Optical performance of B-layer ultra shallow junction silicon photodiodes in the VUV spectral range
L Shi (TU Delft - Electrical Engineering, Mathematics and Computer Science)
F Sarubbi (TU Delft - Electrical Engineering, Mathematics and Computer Science)
LK Nanver (TU Delft - Electrical Engineering, Mathematics and Computer Science)
U Krothc A (External organisation)
A Gottwald (External organisation)
S Nihtianov (TU Delft - Electrical Engineering, Mathematics and Computer Science)