MEMS Hotplates with TiN as a Heater Material
Conference Paper
(2005)
Author(s)
J.F. Creemer (TU Delft - Old - EWI Sect. ECTM)
D Briand (External organisation)
W. van der Vlist (TU Delft - Electronic Components, Technology and Materials)
Charles De Boer (TU Delft - Electronic Components, Technology and Materials)
H.W. Zandbergen (QN/High Resolution Electron Microscopy)
PM Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Old - EWI Sect. ECTM
To reference this document use:
https://resolver.tudelft.nl/uuid:6c1c3d1a-e464-427f-be29-5360f3da317b
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Publication Year
2005
Research Group
Old - EWI Sect. ECTM
Pages (from-to)
330-333
ISBN (print)
0-7803-9057-1
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