MEMS Hotplates with TiN as a Heater Material

Conference paper (2005)

Authors

J.F. Creemer Old - EWI Sect. ECTM
D Briand External organisation
W. van der Vlist Electronic Components, Technology and Materials - EEMCS
C.R. de Boer Electronic Components, Technology and Materials - EEMCS
H.W. Zandbergen QN/High Resolution Electron Microscopy
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Old - EWI Sect. ECTM
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Published Date

2005

Language

Undefined/Unknown

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Research Group

Old - EWI Sect. ECTM