XY360 - Planar positioning stage with a PSD sensor and ferrofluid bearings
Conference Paper
(2016)
Author(s)
Stefan G.E. Lampaert (TU Delft - Mechatronic Systems Design)
R.A.J. van Ostayen (TU Delft - Mechatronic Systems Design)
JW Spronck (TU Delft - Mechatronic Systems Design)
Research Group
Mechatronic Systems Design
To reference this document use:
https://resolver.tudelft.nl/uuid:6c613834-078a-415c-bd84-ad1129d02ba8
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Publication Year
2016
Language
English
Research Group
Mechatronic Systems Design
Pages (from-to)
52-61
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