XY360 - Planar positioning stage with a PSD sensor and ferrofluid bearings
Conference Paper
(2016)
Author(s)
Stefan Lampaert (TU Delft - Mechatronic Systems Design)
H. Habib
Ron van Ostayen (TU Delft - Mechatronic Systems Design)
Jo Spronck (TU Delft - Mechatronic Systems Design)
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https://resolver.tudelft.nl/uuid:6c613834-078a-415c-bd84-ad1129d02ba8
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Publication Year
2016
Language
English
Pages (from-to)
52-61
Event
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117
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