XY360 - Planar positioning stage with a PSD sensor and ferrofluid bearings

Conference Paper (2016)
Author(s)

Stefan Lampaert (TU Delft - Mechanical Engineering)

H. Habib

Ron van Ostayen (TU Delft - Mechanical Engineering)

Jo Spronck (TU Delft - Mechanical Engineering)

Research Group
Mechatronic Systems Design
More Info
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Publication Year
2016
Language
English
Research Group
Mechatronic Systems Design
Pages (from-to)
52-61
Event
DSPE Conference 2016 on Precision Mechatronics (2016-10-04 - 2016-10-05), Sint Michielsgestel, Netherlands
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137

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