The novel contribution of this research is insight into the influence of different parameters in the magnet configurations on the load and stiffness of a ferrofluid pressure bearing. It is shown that magnets with a small cross-section magnetized alternatively up and downwards combine a high load capacity and moderate stiffness while being low on material cost and complexity. The configuration where magnets are placed alternatively in left and right direction magnetized inter spaced with iron yields the highest load capacity and stiffness, albeit at the cost of weight and complexity. It is shown that an increase in the number of magnets is beneficial for the stiffness in both magnetization configurations, as is an increase in remanent flux density of the magnet. A metal bottom plate made of iron reduces the necessary height of the magnet in the up-down magnetization configuration. The model was validated using a bearing pad arranged in the up-down configuration. The force-displacement curve of this pad was measured in a load frame, using the APG 513 ​A ferrofluid from Ferrotec. A load capacity of 1.75 ​N/cm² was achieved, this exceeds previous pressure bearing implementations and performs comparable or better than implementations of single seal ferrofluid pocket bearings. These results show that the ferrofluid pressure bearing is a passive alternative in motion systems where the designer otherwise would have needed to use an active bearing.

The objective of this research is to demonstrate the capability of a long stroke linear ferrofluid (FF) stage. This stage is a passive alternative to existing linear aerostatic stages and can be used in low loaded CNC devices, pick and place machines, microscopy or scanner applications. To compete with aerostatic stages the bearing must be repeatable and achieve sufficient stiffness for the application. The effects of ferrofluid trail formation are countered with the use of a ferrofluid reservoir located on the mover. To increase stiffness a specially designed magnet configuration is used. A linear guidance was built with outer dimensions of 180x600x80 mm (WxLxH), a mover of 1.8 kg without actuator and payload having a 430 mm stroke. The load capacity of the stage was measured to be 120 N, with a stiffness of 0.4 N/μm. The maximum height delta after a stroke with 1 kg payload and a mover velocity of 0.25 m/s was measured to be less than ±3μm, and with 1.75 kg payload and a velocity of 0.5 m/s the height delta was within ±7μm. Using a rheometer, it was shown that the effects of evaporation in ferrofluid can be reversed, within certain limits of mass loss, by adding carrier fluid. The damping is shown to be a function of payload and velocity and was measured to be between 2 and 4 N⋅s/m for velocities between 0.2 and 0.5 m/s. In comparison to a linear aerostatic stage it can be concluded that while the linear ferrofluid stage is outperformed in stiffness and out-of-plane repeatability, the ferrofluid stage does not require a continuous supply of air and has lower fabrication tolerances due to the higher fly height. Thus, the linear ferrofluid stage is a cost-effective alternative to a linear aerostatic stage when the stiffness and straightness are of less importance.

Ferrofluid pocket bearings are interesting for fast and precise positioning systems thank to the absence of stick-slip, the low viscous friction and their cost-effective nature. However, the characteristics of the bearing change due to over(de)compression since air escapes out of the enclosed pocket. This article presents an experimentally validated model that includes the air mass inside the pocket in the calculation of the equilibrium position of the ferrofluid bearing. Moreover, a simple and efficient way to obtain the operational range of the bearing is presented and a sensitivity analysis was performed. The sensitivity analysis showed that ferrofluid pocket bearings are always self-aligning and that the tilt stiffness increases when the fly height decreases or the tilt angle increases.

Ferrofluid pocket bearings are a type of bearing that are able to carry a load using an air pocket encapsulated by a ferrofluid seal. Previously designed ferrofluid bearings show the great potential of the stick-slip-free and low viscous friction bearings, however until now the load capacity is limited. In this article a method is presented to increase the load capacity in a simple and cost effective way by the addition of ferromagnetic material around the magnet. First, a mathematical model of the bearing is presented and is validated by experiments using an axially magnetized ring magnet surrounded by two steel rings. The model is used to optimize the dimensions of the added ferromagnetic material for maximum load capacity. Depending on the fly height, the load capacity has been increased by a factor three to four by the addition of steel rings to the ferrofluid pocket bearing configuration.

A ferrofluid pocket bearings is a type of hydrostatic bearing that uses a ferrofluid seal to encapsulate a pocket of air to carry a load. Their properties, combining a high stiffness with low (viscous) friction and absence of stick-slip, make them interesting for applications that require fast and high precision positioning. Knowledge on the exact performance of these types of bearings is up to now not available. This article presents a method to model the load carrying capacity and normal stiffness characteristics of this type of bearings. Required for this is the geometry of the bearing, the shape of the magnetic field and the magnetization strength of the fluid. This method is experimentally validated and is shown to be correct for describing the load and stiffness characteristics of any fixed shape of ferrofluid pocket bearing.

Ferrofluid bearings have been demonstrated to be very interesting for precision positioning systems. The friction of these bearings is free of stick-slip which results in an increase of precision. More knowledge on the friction behaviour of these bearings is important for there application in precision positioning systems. This paper demonstrates that the friction of a ferrofluid bearing can be modelled by a viscous damper model and provides a basic model to predict the friction behaviour of a bearing design. The model consists of a summation of a Couette flow with a Poiseuille flow such that there is no net fluid transport under the bearing pads. The model is experimentally validated on a six degrees of freedom stage using ferrofluid bearings. A stiffness in the form of a closed-loop control gain is introduced in the system to create a resonance peak at the desired frequency. The damping coefficient can be identified from the peak height of the resonance, since the peak height is the ratio of total energy to dissipated energy in the system. The results show that the newly derived model can be used to make an estimate of the damping coefficient for small(∼1mm) stroke translations. Furthermore, the model shows that the load capacity of a ferrofluid pocket bearing is affected during sliding.

A cost-effective position measurement system based on optical mouse sensors is presented in this work. The system is intended to be used in a planar positioning stage for microscopy applications and as such, has strict resolution, accuracy, repeatability, and sensitivity requirements. Three techniques which improve the measurement system's performance in the context of these requirements are proposed; namely, an optical magnification of the image projected onto the mouse sensor, a periodic homing procedure to reset the error buildup, and a compensation of the undesired dynamics caused by filters implemented in the mouse sensor chip.