RM
R.H. Munnig Schmidt
Authored
17 records found
Photolithography equipment manufacturers are continuously developing machines with ever increasing resolution and wafer throughput. The development has shown that previously less dominant performance limiting factors are increasingly impacting the conformity between the projected
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Photolithography equipment manufacturers are continuously developing machines with ever increasing resolution and wafer throughput. The development has shown that previously less dominant performance limiting factors are increasingly impacting the conformity between the projected
...
Photolithography equipment manufacturers are continuously developing machines with ever increasing resolution and wafer throughput. The development has shown that previously less dominant performance limiting factors are increasingly impacting the conformity between the projected
...
Abstract
This paper focuses on integration of a permanent magnet motor with active magnetic bearings for driving a high-speed micro-milling spindle. A new concept of supporting a short rotor with a slotless PM motor embedded by 5DOF bearings is conceived. In the concept, the bear
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Abstract
This paper focuses on integration of a permanent magnet motor with active magnetic bearings for driving a high-speed micro-milling spindle. A new concept of supporting a short rotor with a slotless PM motor embedded by 5DOF bearings is conceived. In the concept, the bear
...
Abstract
This paper focuses on integration of a permanent magnet motor with active magnetic bearings for driving a high-speed micro-milling spindle. A new concept of supporting a short rotor with a slotless PM motor embedded by 5DOF bearings is conceived. In the concept, the bear
...
Abstract
This paper focuses on integration of a permanent magnet motor with active magnetic bearings for driving a high-speed micro-milling spindle. A new concept of supporting a short rotor with a slotless PM motor embedded by 5DOF bearings is conceived. In the concept, the bear
...
Abstract
This paper focuses on integration of a permanent magnet motor with active magnetic bearings for driving a high-speed micro-milling spindle. A new concept of supporting a short rotor with a slotless PM motor embedded by 5DOF bearings is conceived. In the concept, the bear
...
In order to overcome problems due to the mounting tolerances for precision capacitive position sensors, a thermally driven actuator has been developed. Friction plays a key role in this actuator. Due to the small internal displacements, a creep-based friction model explains the p
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In order to overcome problems due to the mounting tolerances for precision capacitive position sensors, a thermally driven actuator has been developed. Friction plays a key role in this actuator. Due to the small internal displacements, a creep-based friction model explains the p
...
In order to overcome problems due to the mounting tolerances for precision capacitive position sensors, a thermally driven actuator has been developed. Friction plays a key role in this actuator. Due to the small internal displacements, a creep-based friction model explains the p
...
In order to overcome problems due to the mounting tolerances for precision capacitive position sensors, a thermally driven actuator has been developed. Friction plays a key role in this actuator. Due to the small internal displacements, a creep-based friction model explains the p
...
A new contact-less transport system for thin and fragile products like silicon wafers is introduced. The product is carried on a thin film of air separating the product from the system, and is transported using the relative velocity of the pressurized and moving air film parallel
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A new contact-less transport system for thin and fragile products like silicon wafers is introduced. The product is carried on a thin film of air separating the product from the system, and is transported using the relative velocity of the pressurized and moving air film parallel
...
A new contact-less transport system for thin and fragile products like silicon wafers is introduced. The product is carried on a thin film of air separating the product from the system, and is transported using the relative velocity of the pressurized and moving air film parallel
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Displacement interferometry is widely used for accurately characterizing nanometer and subnanometer displacements in many applications. In many modern systems, fiber delivery is desired to limit optical alignment and remove heat sources from the system, but fiber delivery can exa
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Displacement interferometry is widely used for accurately characterizing nanometer and subnanometer displacements in many applications. In many modern systems, fiber delivery is desired to limit optical alignment and remove heat sources from the system, but fiber delivery can exa
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Contributed
3 records found
Active Positioning and Passive Fixation using Friction
In Capacitive Displacement Measurement Applications
Sensor positioning is critical for achieving a measurement accuracy in the picometre range with capacitive displacement sensors. This thesis discusses the contradictory requirements that the sensor alignment application imposes: motion capability combined with extreme displacemen
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Shape fitting
Application to the estimation of wafer chuck deformation
In wafer scanners - the machines that define the details of electronic chips - there is a need for highly accurate deformation measurements of the machine components during the chip manufacturing process.
This thesis develops an estimation methodology, based on shape fitting prin
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