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In this paper, an analytical model of an electrothermal filter (ETF) is described. It is based on thermal impedance theory and employs several simplifying assumptions to model an ETF implemented in CMOS technology. A CMOS ETF's phase-shift has a well-defined temperature dependenc ...
An autonomous capacitive sensor system for high accuracy and stability position measurement, such as required in high-precision industrial equipment, is presented. The system incorporates a self-alignment funcion based on a thermal stepping motor and a built-in capacitive referen ...
This thesis describes the theory, design, and implementation of high-speed capacitive displacement sensor interface circuits. The intended application is to readout the capacitive displacement sensor used in a servo loop, where the measurement time needs to be low to ensure loop ...