SX
S. Xia
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This thesis describes the theory, design, and implementation of high-speed capacitive displacement sensor interface circuits. The intended application is to readout the capacitive displacement sensor used in a servo loop, where the measurement time needs to be low to ensure loop stability....
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This thesis describes the theory, design, and implementation of high-speed capacitive displacement sensor interface circuits. The intended application is to readout the capacitive displacement sensor used in a servo loop, where the measurement time needs to be low to ensure loop stability....
Conference paper
(2012)
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OS van de Ven, D Yang, S Xia, JP van Schieveen, JW Spronck, RH Munnig Schmidt, S Nihtianov
An autonomous capacitive sensor system for high accuracy and stability position measurement, such as required in high-precision industrial equipment, is presented. The system incorporates a self-alignment funcion based on a thermal stepping motor and a built-in capacitive reference, to guarantee that the relative position between the sensor electrodes is set to 10 ± 0.1µm. This is needed to achieve the performance specifications with the capacitive readout. In addition, an electronic zoom-in method is used to reach the 10 pm resolution with minimum power dissipation. Finally, periodic self-calibration of the electronic capacitance readout is realized using a very accurate and stable built-in resistive reference. The performance is evaluated experimentally and with simulations.
Keywords: Capacitive Sensor System, Position Measurement, Self Alignment, Self Calibration, Thermal Actuator
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An autonomous capacitive sensor system for high accuracy and stability position measurement, such as required in high-precision industrial equipment, is presented. The system incorporates a self-alignment funcion based on a thermal stepping motor and a built-in capacitive reference, to guarantee that the relative position between the sensor electrodes is set to 10 ± 0.1µm. This is needed to achieve the performance specifications with the capacitive readout. In addition, an electronic zoom-in method is used to reach the 10 pm resolution with minimum power dissipation. Finally, periodic self-calibration of the electronic capacitance readout is realized using a very accurate and stable built-in resistive reference. The performance is evaluated experimentally and with simulations.
Keywords: Capacitive Sensor System, Position Measurement, Self Alignment, Self Calibration, Thermal Actuator