High-Speed Interfaces for Capacitive Displacement Sensor

Doctoral thesis (2019)

Authors

S. Xia Electronic Instrumentation - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
Copyright: © 2019 S. Xia
DOI
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https://doi.org/10.4233/uuid:9f4042e1-ceb3-4894-90c5-3602bd0a1276
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Published Date

2019

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation

Abstract

This thesis describes the theory, design, and implementation of high-speed capacitive displacement sensor interface circuits. The intended application is to readout the capacitive displacement sensor used in a servo loop, where the measurement time needs to be low to ensure loop stability....