Contact-less thin substrate transport using viscous traction

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Contact-less thin substrate transport using viscous traction

Conference Paper (2012)

Author(s)

Ron van Ostayen (TU Delft - Mechanical Engineering)

Jan van Eijk (TU Delft - Mechanical Engineering)

Robert Munnig Schmidt (TU Delft - Mechanical Engineering)

Research Group

Mechatronic Systems Design

Geometry Acceleration Arrays Force Actuators Substrates Traction motors

DOI related publication

https://doi.org/10.1109/dMEMS.2012.19 Final published version

To reference this document use

https://resolver.tudelft.nl/uuid:4c259be1-d08d-4124-a42b-20d00951b68f

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Publication Year

2012

Language

English

Research Group

Mechatronic Systems Design

Pages (from-to)

14-21

ISBN (print)

978-0-7695-4679-7

Event

Second Workshop on Design, Control and Software Implementation for Distributed MEMS (2012-04-02 - 2012-04-03), Besançon, France

Downloads counter

136

Abstract

A new contact-less transport system for thin and fragile products like silicon wafers is introduced. The product is carried on a thin film of air separating the product from the system, and is transported using the relative velocity of the pressurized and moving air film parallel and adjacent to the system surface. This innovative concept can produce both the high stiffness and acceleration required for high precision positioning and efficient product transport. In this paper the basic design principles of this system are presented. Experimental verification is demonstrated on a 6-dof planar air actuated high precision positioning stage.