Correction to
Highly-sensitive wafer-scale transfer-free graphene MEMS condenser microphones (Microsystems & Nanoengineering, (2024), 10, 1, (27), 10.1038/s41378-024-00656-x)
R. Pezone (TU Delft - Electronic Components, Technology and Materials)
Sebastian Anzinger (Infineon Technologies AG)
Gabriele Baglioni (TU Delft - QN/Quantum Nanoscience, TU Delft - QN/van der Zant Lab)
Hutomo Suryo Wasisto (Infineon Technologies AG)
Pasqualina M Sarro (TU Delft - Electronic Components, Technology and Materials)
P.G. Steeneken (TU Delft - QN/Quantum Nanoscience, TU Delft - Precision and Microsystems Engineering, TU Delft - Dynamics of Micro and Nano Systems)
S. Vollebregt (TU Delft - Electronic Components, Technology and Materials)
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Abstract
Correction to: Microsystems & Nanoengineering https://doi.org/10.1038/s41378-024-00656-x published online 21 February 2024 After publication of this article1, it was brought to our attention that two pressure values were not correctly copied from the submitted original work to the published version. Correction 1 (from PDF, Page 4 of 9): “These membranes show resonance frequencies above the audible range (f01 > 20 kHz) at 1 × 103 mbar by piezo-shaker actuation”. The described phrase needs to be changed reporting the right pressure value of 1 × 10−3 mbar. The new phrase will be: “These membranes show resonance frequencies above the audible range (f01 > 20 kHz) at 1 × 10−3 mbar by piezo-shaker actuation”. Correction 2 (from PDF, Page 4 of 9): “Energy losses and dampening are minimized due to the low pressure of 1 × 103 mbar”. Again, the described phrase needs to be changed reporting the right pressure value of 1 × 10−3 mbar. The new phrase will be: “Energy losses and dampening are minimized due to the low pressure of 1 × 10−3 mbar”.