Experimental evalution of a dual-axis ultra-precision positioning stage for probe studies

Conference paper (2008)

Authors

ES Buice Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
ST Smith External organisation
RJ Hocken External organisation
Research Group
Mechatronic Systems Design (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2008

Language

Undefined/Unknown

Reuse Rights

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Mechatronic Systems Design