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Development of a new micro-machining center concept with integrated metrology modules.

Conference paper - ES Buice, HH Langen, R.H. Munnig Schmidt

This paper presents the development of a micro-machining center to manufacture micro-scaled parts utilizing micro-milling, micro-EDM and micro-ECM. In addition to manufacturing versatility, it is envisaged to integrate metrology tools for on the machine part verifiction. The syst ...

Control strategies for a dynamic positioning machine at nanometer level

Conference paper - RH Yang, CS Teo, ES Buice, X. Liu, ST Smith

A dynamic positioning machine for nanoscale engineering has been developed. The system comprises of a 2 DOF long range translation stage carrying a 6 DOF shorte tange stage. The long range stage can travese an area of 50 mmx50 mm while the shorte range stage can provide up to 17 ...

ES Buice

Authored

Development of a new micro-machining center concept with integrated metrology modules.

Control strategies for a dynamic positioning machine at nanometer level

Importance of metrology in micro-machine tools

Incorporating metrology into the manufacturing process

Experimental evalution of a dual-axis ultra-precision positioning stage for probe studies

Frequency stabilized three mode HeNe laser using nonlinear optical phenomena.

Magnetic field effects on the secondary beat frequency profile for three mode HeNe laser stabilization

A novel heterodyne displacement interferometer with no detactable periodic nnlinearity and optical resolution doubling

Towards micro (hard) milling using miniature active magnetic bearings

Development of an Atomic Force Microscope

Frequency Stabilization via the Mixed Mode in Three Mode HeNe Lasers

High resolution heterodyne interferometer without detectable periodic nonlinearity.

Design evaluation of a single-axis precision controlled positioning stage.

Controller strategies for an ultra-high precision stage.