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A dynamic positioning machine for nanoscale engineering has been developed. The system comprises of a 2 DOF long range translation stage carrying a 6 DOF shorte tange stage. The long range stage can travese an area of 50 mmx50 mm while the shorte range stage can provide up to 17 ...
This paper presents the development of a micro-machining center to manufacture micro-scaled parts utilizing micro-milling, micro-EDM and micro-ECM. In addition to manufacturing versatility, it is envisaged to integrate metrology tools for on the machine part verifiction. The syst ...