A novel heterodyne displacement interferometer with no detactable periodic nnlinearity and optical resolution doubling
Conference Paper
(2010)
Author(s)
K Joo (TU Delft - Mechatronic Systems Design)
JD Ellis (TU Delft - Mechatronic Systems Design)
ES Buice (TU Delft - Mechatronic Systems Design)
Jo Spronck (TU Delft - Mechatronic Systems Design)
Robert Munnig Schmidt (TU Delft - Mechatronic Systems Design)
Research Group
Mechatronic Systems Design
To reference this document use:
https://resolver.tudelft.nl/uuid:ea4001ef-667a-458b-b9a0-21638a4aef6e
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Publication Year
2010
Research Group
Mechatronic Systems Design
Pages (from-to)
67-70
ISBN (print)
13 978-0-9553082-8-4
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