Controller strategies for an ultra-high precision stage.

Conference paper (2009)

Authors

CS Teo External organisation
ST Smith External organisation
RH Yang External organisation
RJ Hocken External organisation
ES Buice Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
Research Group
Mechatronic Systems Design (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2009

Language

Undefined/Unknown

Reuse Rights

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Mechatronic Systems Design