Controller strategies for an ultra-high precision stage.
Conference Paper
(2009)
Author(s)
CS Teo (External organisation)
ST Smith (External organisation)
RH Yang (External organisation)
RJ Hocken (External organisation)
ES Buice (TU Delft - Mechatronic Systems Design)
Research Group
Mechatronic Systems Design
To reference this document use:
https://resolver.tudelft.nl/uuid:77ceaa8d-f1e8-4d21-ba6a-3e3c1174b0f8
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Publication Year
2009
Research Group
Mechatronic Systems Design
Pages (from-to)
220-227
ISBN (print)
978-0-9553082-6-0
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