Fabrication and characterization of p-type silicon field-emitter arrays for lithography
Journal Article
(2005)
Author(s)
TF Teepen (TU Delft - ImPhys/Charged Particle Optics)
H van 't Spijker (External organisation)
S. Steenbrink (External organisation)
A van Zuuk (External organisation)
C.T.H. Heerkens (TU Delft - ImPhys/Charged Particle Optics)
N van Druten (External organisation)
M Wieland (External organisation)
P. Kruit (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:701e80b9-ef26-419d-9872-957a0c9c321c
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Publication Year
2005
Research Group
ImPhys/Charged Particle Optics
Issue number
2
Volume number
23
Pages (from-to)
359-369
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