Stability characterization of high-sensitivity silicon-based EUV photodiodes in a detrimental industrial environment

Conference Paper (2011)
Author(s)

L Shi (TU Delft - Electronic Instrumentation)

L. K. Nanver (TU Delft - Electronic Components, Technology and Materials)

Stoyan Nihtianova (TU Delft - Electronic Instrumentation)

Research Group
Electronic Instrumentation
DOI related publication
https://doi.org/10.1109/IECON.2011.6119729
More Info
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Publication Year
2011
Language
English
Research Group
Electronic Instrumentation
Pages (from-to)
2651-2656

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