Through Silicon Interconnect Using grayscale Lithography for MEMS Applications
Conference Paper
(2009)
Author(s)
Henk W. van Zeijl (TU Delft - Electronic Components, Technology and Materials)
D Liu (TU Delft - Electronic Components, Technology and Materials)
Pasqualina Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:7436e2a6-7c4b-41d5-b1ff-6b9a5d938046
More Info
expand_more
expand_more
Publication Year
2009
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
1543-1546
No files available
Metadata only record. There are no files for this record.