Reactive sputter deposition of aluminium nitride thin films as heat spreaders in IC processes
Conference Paper
(2005)
Author(s)
H. Schellevis (TU Delft - Electronic Components, Technology and Materials)
L. La Spina (TU Delft - Electronic Components, Technology and Materials)
N Nenadovic (TU Delft - Electronic Components, Technology and Materials)
L. K. Nanver (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
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https://resolver.tudelft.nl/uuid:749539c3-e00b-4f4e-86ad-af897af46d59
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Publication Year
2005
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
1-1
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