Evaluation of al-doped SPE ultrashallow P+N junctions for use as PNP SiGe HBT emitters

Conference paper (2008)

Authors

Y Civale Old - EWI Sect. ECTM
G. Lorito Old - EWI Sect. ECTM
Chengcheng Xu External organisation
L.K. Nanver Electronic Components, Technology and Materials - EEMCS
R. van der Toorn Old - EWI Sect. ECTM
Research Group
Old - EWI Sect. ECTM
More Info
expand_more

Published Date

2008

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Research Group

Old - EWI Sect. ECTM