Evaluation of al-doped SPE ultrashallow P+N junctions for use as PNP SiGe HBT emitters
Conference Paper
(2008)
Author(s)
Y Civale (TU Delft - Old - EWI Sect. ECTM)
G. Lorito (TU Delft - Old - EWI Sect. ECTM)
Chengcheng Xu (External organisation)
LK Nanver (TU Delft - Electronic Components, Technology and Materials)
Ramses van der Toorn (TU Delft - Old - EWI Sect. ECTM)
Research Group
Old - EWI Sect. ECTM
To reference this document use:
https://resolver.tudelft.nl/uuid:74a5c70d-89e1-4974-b391-7937263bf125
More Info
expand_more
expand_more
Publication Year
2008
Research Group
Old - EWI Sect. ECTM
Pages (from-to)
97-100
ISBN (print)
978-1-4244-1737-7
No files available
Metadata only record. There are no files for this record.