Evaluation of al-doped SPE ultrashallow P+N junctions for use as PNP SiGe HBT emitters

Conference Paper (2008)
Author(s)

Y Civale (TU Delft - Old - EWI Sect. ECTM)

G. Lorito (TU Delft - Old - EWI Sect. ECTM)

Chengcheng Xu (External organisation)

LK Nanver (TU Delft - Electronic Components, Technology and Materials)

Ramses van der Toorn (TU Delft - Old - EWI Sect. ECTM)

Research Group
Old - EWI Sect. ECTM
More Info
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Publication Year
2008
Research Group
Old - EWI Sect. ECTM
Pages (from-to)
97-100
ISBN (print)
978-1-4244-1737-7

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