Microstructure of hydrogenated silicon thin films prepared from silane diluted with hydrogen
Journal Article
(2007)
Author(s)
J Müllerová (External organisation)
P ¿utta (External organisation)
G van Elzakker (TU Delft - Electronic Components, Technology and Materials)
Miro Zeman (TU Delft - Electronic Components, Technology and Materials)
M Mikula (External organisation)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1016/j.apsusc.2007.10.069
To reference this document use:
https://resolver.tudelft.nl/uuid:74df3b12-e115-4d0d-b2d4-0a66712391ee
More Info
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Publication Year
2007
Research Group
Electronic Components, Technology and Materials
Issue number
12
Volume number
254
Pages (from-to)
3690-3695
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