Galvanic cell formation: a review of approaches to silicon etching for sensor fabrication
Journal Article
(2001)
Author(s)
JJ Kelly (External organisation)
XH Xia (External organisation)
Colin Ashruf (TU Delft - Electronic Instrumentation)
Paddy French (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:77ef1ad1-966c-4765-a07a-4b63d36f0631
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Publication Year
2001
Research Group
Electronic Instrumentation
Issue number
2
Volume number
1
Pages (from-to)
127-142
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