Galvanic cell formation: a review of approaches to silicon etching for sensor fabrication

Journal article (2001)

Authors

JJ Kelly External organisation
XH Xia External organisation
CMA Ashruf Electronic Instrumentation - EEMCS
P.J. French Electronic Instrumentation - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2001

Language

Undefined/Unknown

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation