Micromachined SLM based on pixelated reflective membranes
Conference Paper
(1999)
Author(s)
S Sakarya (TU Delft - Electronic Instrumentation)
G Vdovin (External organisation)
Lina P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Instrumentation
To reference this document use:
https://resolver.tudelft.nl/uuid:780f7a92-66a8-424d-9b8c-907be07b5b43
More Info
expand_more
expand_more
Publication Year
1999
Research Group
Electronic Instrumentation
Pages (from-to)
23-31
ISBN (print)
0-8194-3246-6
No files available
Metadata only record. There are no files for this record.