On the origin of stress in magnetron sputtered TiN layers.

Journal article (2000)

Authors

J. Kamminga OLD Metals Processing, Microstructures and Properties
Th.H de Keijser External organisation
R. Delhez OLD Virtual Materials and Mechanics
EJ Mittemeijer OLD Virtual Materials and Mechanics
Research Group
OLD Metals Processing, Microstructures and Properties
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Published Date

2000

Language

Undefined/Unknown

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Research Group

OLD Metals Processing, Microstructures and Properties