On the origin of stress in magnetron sputtered TiN layers.
Journal Article
(2000)
Author(s)
J-D Kamminga (TU Delft - OLD Metals Processing, Microstructures and Properties)
Th.H de Keijser (External organisation)
R Delhez (TU Delft - OLD Virtual Materials and Mechanics)
EJ Mittemeijer (TU Delft - OLD Virtual Materials and Mechanics)
Research Group
OLD Metals Processing, Microstructures and Properties
To reference this document use:
https://resolver.tudelft.nl/uuid:78390e99-64bd-4d02-a9ae-71cd82911a50
More Info
expand_more
expand_more
Publication Year
2000
Research Group
OLD Metals Processing, Microstructures and Properties
Issue number
11
Volume number
88
Pages (from-to)
6332-6345
No files available
Metadata only record. There are no files for this record.