A Piezo-driven TEM-stage with subnanometer position stability Proceedings American Society for Precision Engineering

van der Wulp, H; van Beek, HF; Mertens, BM

A Piezo-driven TEM-stage with subnanometer position stability Proceedings American Society for Precision Engineering

Conference paper (1996)

Authors

H van der Wulp External organisation

HF van Beek External organisation

BM Mertens ImPhys/Charged Particle Optics

Research Group

ImPhys/Charged Particle Optics

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Published Date

1996

Language

English

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Research Group

ImPhys/Charged Particle Optics

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