A Piezo-driven TEM-stage with subnanometer position stability Proceedings American Society for Precision Engineering
Conference Paper
(1996)
Author(s)
H van der Wulp (External organisation)
HF van Beek (External organisation)
BM Mertens (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:7a7db33f-4ceb-48ee-ac7f-b3743184d481
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Publication Year
1996
Language
English
Research Group
ImPhys/Charged Particle Optics
Pages (from-to)
26-31
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