Design and fabrication of 45° inclined mirrors for wafer-level optical absorption spectroscopy
N.P. Ayerden (TU Delft - Electronic Instrumentation)
M. Ghaderi (TU Delft - Electronic Instrumentation)
R.F. Wolffenbuttel (TU Delft - Electronic Instrumentation)
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Abstract
The increasing demand for small, robust and low-cost gas sensors triggers the batch fabrication of highly selective and sensitive miniaturized devices. A linear variable optical filter (LVOF) based microspectrometer enables selectivity in a wide wavelength range, while maintaining the robustness and low cost. To achieve sensitivity in an LVOF based absorption spectrometer, a long gas cell is required. In this paper, we propose an on-chip absorption path that also serves as a gas cell, where the light beam is steered using 45° inclined mirrors. The fabrication of 45° inclined mirrors is demonstrated and optical efficiency of the system is analyzed using ray tracing.
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