Design of a nanometer precision wavelength modulated interferometer
W.P.C. van de Sande (TU Delft - Mechanical Engineering)
L.A. Cacace – Mentor (TU Delft - Optical Technologies)
J.W. Spronck – Mentor (TU Delft - Mechatronic Systems Design)
More Info
expand_more
Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.
Abstract
A wavelength modulated interferometer is presented, based on a telecom laser source. A solution for the target distance dependency of wavelength modulated interferometers is presented. With the introduction of a delay line, the modulation depth variation is reduced. A method and a sensor head for the reduction of the thermal dependency of this delay line are presented. The resulting interferometer has sub-nanometer non linearity errors and a thermal dependency of below 3 nmK¡1 with a working range of 1meter.