Design of a nanometer precision wavelength modulated interferometer

Master thesis (2021)

Authors

W.P.C. van de Sande Mechanical Engineering

Contributors

L.A. Cacace Optical Technologies - Mechanical, Maritime and Materials Engineering (mentor)

J.W. Spronck Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering (mentor)

Faculty

Mechanical Engineering, Mechanical Engineering

Interferometry Metrology Phase measurement Displacement measurement Optical measurement

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Published Date

14-10-2021

Language

English

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Faculty

Mechanical Engineering

Abstract

A wavelength modulated interferometer is presented, based on a telecom laser source. A solution for the target distance dependency of wavelength modulated interferometers is presented. With the introduction of a delay line, the modulation depth variation is reduced. A method and a sensor head for the reduction of the thermal dependency of this delay line are presented. The resulting interferometer has sub-nanometer non linearity errors and a thermal dependency of below 3 nmK¡1 with a working range of 1meter.

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