Experimental verification of Rarefied Gas Squeezed-Film Damping Models used in MEMS (U-SP-2-I-ICT)
Conference Paper
(2006)
Author(s)
L Mol (TU Delft - Electronic Instrumentation)
RF Wolffenbuttel (TU Delft - Electronic Instrumentation)
LA Rocha (TU Delft - Electronic Instrumentation)
E Cretu (External organisation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:7c633264-e67c-4622-a06b-4098c2856fe4
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Publication Year
2006
Research Group
Electronic Instrumentation
Pages (from-to)
1-4
ISBN (print)
0-7918-3790-4
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