MEMS oscillating squeeze-film pressure sensor with optoelectronic feedback
Journal Article
(2015)
Author(s)
L Kumar (External organisation)
K Reimann (External organisation)
MJ Goossens (External organisation)
WF Besling (External organisation)
RJ Dolleman (External organisation)
RH Pijnenburg (External organisation)
P.G. Steeneken (TU Delft - QN/Steeneken Lab)
Research Group
QN/Mol. Electronics & Devices
To reference this document use:
https://resolver.tudelft.nl/uuid:7cfc035e-0c2b-4eae-bb48-50ed4d206043
More Info
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Publication Year
2015
Language
English
Research Group
QN/Mol. Electronics & Devices
Issue number
4
Volume number
25
Pages (from-to)
054011-054020
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