MEMS oscillating squeeze-film pressure sensor with optoelectronic feedback

Journal article (2015)

Authors

L Kumar External organisation
K Reimann External organisation
MJ Goossens External organisation
WF Besling External organisation
RJ Dolleman External organisation
RH Pijnenburg External organisation
P.G. Steeneken QN/Steeneken Lab - AS
Research Group
QN/Mol. Electronics & Devices
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Published Date

2015

Language

English

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Research Group

QN/Mol. Electronics & Devices