Surface-passivated high-resistivity silicon as a true microwave substrate

Marco Spirito (TU Delft - Old - EWI Ch. Integrated Sensing Devices)

FM De Paola (TU Delft - Microelectronics)

Lis Nanver (TU Delft - Electronic Components, Technology and Materials)

E Valletta (TU Delft - Old - EWI Ch. Integrated Sensing Devices)

B Rong (TU Delft - Old - EWI Ch. Integrated Sensing Devices)

B Rejaei (External organisation)

L.C.N. de Vreede (TU Delft - Old - EWI Ch. Integrated Sensing Devices)

JN Burghartz (TU Delft - Old - EWI Ch. Integrated Sensing Devices)