High aspect ratio copper electroplating process for compact coplanar transmission line implementation

Conference paper (2005)

Authors

H Sagkol Old - EWI Ch. Integrated Sensing Devices
B. Rajaei Salmasi Old - EWI Ch. Integrated Sensing Devices
JN Burghartz Old - EWI Ch. Integrated Sensing Devices
Research Group
Old - EWI Ch. Integrated Sensing Devices
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Published Date

2005

Language

Undefined/Unknown

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Research Group

Old - EWI Ch. Integrated Sensing Devices