Shot noise in electron beam lithography and line width measurements
Journal Article
(2005)
Author(s)
P. Kruit (TU Delft - ImPhys/Charged Particle Optics)
S. Steenbrink (External organisation)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:80aeac74-cb2f-45ee-8147-48b233df00e9
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Publication Year
2005
Research Group
ImPhys/Charged Particle Optics
Issue number
2
Volume number
27
Pages (from-to)
67-68
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