An SOI thermal-diffusivity-based temperature sensor with ±0.6°C (3-sigma) untrimmed inaccuracy from -70°C to 170°C

Conference Paper (2011)
Author(s)

C.P.L. van Vroonhoven (TU Delft - Electronic Instrumentation)

K. A. A. Kofi (TU Delft - Electronic Instrumentation)

Research Group
Electronic Instrumentation
DOI related publication
https://doi.org/10.1109/TRANSDUCERS.2011.5969119
More Info
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Publication Year
2011
Language
English
Research Group
Electronic Instrumentation
Pages (from-to)
2887-2890
ISBN (print)
978-1-4577-0157-3

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