An SOI thermal-diffusivity-based temperature sensor with ±0.6°C (3-sigma) untrimmed inaccuracy from -70°C to 170°C

Conference paper (2011)

Authors

C.P.L. van Vroonhoven Electronic Instrumentation - EEMCS
K.A.A. Makinwa Electronic Instrumentation - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2011

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation