Relative optical wavefront measurement in displacement measuring interferometer systems with sub-nm precision
Journal Article
(2013)
Author(s)
Adrianus J.H. Meskers (TU Delft - Mechatronic Systems Design)
D Voigt (External organisation)
Jo W. Spronck (TU Delft - Mechatronic Systems Design)
Research Group
Mechatronic Systems Design
DOI related publication
https://doi.org/10.1364/OE.21.017920
To reference this document use:
https://resolver.tudelft.nl/uuid:812772c6-1bc7-42cc-abc4-107dd7c2dadc
More Info
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Publication Year
2013
Language
English
Research Group
Mechatronic Systems Design
Issue number
15
Volume number
21
Pages (from-to)
17920-17930
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