Step coverage of ALD nanolayers on 3D microstructures

Conference paper (2008)

Authors

HTM Pham Old - EWI Sect. ECTM
L Constanzo External organisation
C.R. de Boer Electronic Components, Technology and Materials - EEMCS
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Old - EWI Sect. ECTM
Elektrotechniek Techniek
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Published Date

2008

Language

Undefined/Unknown

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Research Group

Old - EWI Sect. ECTM