Step coverage of ALD nanolayers on 3D microstructures
Conference Paper
(2008)
Author(s)
HTM Pham (TU Delft - Old - EWI Sect. ECTM)
L Constanzo (External organisation)
CR De Boer (TU Delft - Electronic Components, Technology and Materials)
Pasqualina M Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Old - EWI Sect. ECTM
To reference this document use:
https://resolver.tudelft.nl/uuid:818b3e1e-428d-4e90-9bdf-5e31f73cb403
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Publication Year
2008
Research Group
Old - EWI Sect. ECTM
Pages (from-to)
547-552
ISBN (print)
978-909023470
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