Pattern dependency of pure-boron-layer chemical-vapor depositions
Journal Article
(2012)
Author(s)
V Mohammadi (TU Delft - Electronic Components, Technology and Materials)
WB De Boer (TU Delft - Old - EWI Sect. ECTM)
TLM Scholtes (TU Delft - Electronic Components, Technology and Materials)
L. K. Nanver (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1149/1.3700937
To reference this document use:
https://resolver.tudelft.nl/uuid:819b5556-9e0a-468f-aa02-dd9cb576a2d4
More Info
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Publication Year
2012
Language
English
Research Group
Electronic Components, Technology and Materials
Issue number
6
Volume number
45
Pages (from-to)
39-48
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