Location-control of large grains by ¿-czochralski (grain filter) process and its application to single-crystalline silicon thin-film transistors
Conference Paper
(2002)
Author(s)
Ryoichi Ishihara (TU Delft - Electronic Components, Technology and Materials)
PC van der Wilt (TU Delft - Electronic Components, Technology and Materials)
BD van Dijk (TU Delft - Electronic Components, Technology and Materials)
JW Metselaar (TU Delft - Electronic Components, Technology and Materials)
Kees Beenakker (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
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https://resolver.tudelft.nl/uuid:81ff1c36-80b8-48ef-8a47-f50312d3bce8
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Publication Year
2002
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
63-74
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