A MEMS Actuator System for an Integrated 3-D Optical Coherent Tomography Scanner
Aleksandar Jovic (TU Delft - EKL Processing)
Grégory Pandraud (TU Delft - EKL Processing)
Nuria Sanchez (MedLumics)
Juan Sancho (MedLumics)
Kirill Zinoviev (IMEC)
Jose L. Rubio (MedLumics)
E Margallo Balbas (MedLumics)
P. M. Sarro (TU Delft - Electronic Components, Technology and Materials)
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Abstract
In this paper, we present an electrothermal biaxial MEMS actuator system, which provides x-A nd y-direction scanning for a fully integrated 3-D optical coherence tomography (OCT) scanner. An angular scanning range of 8° (corresponding to a 7-mm linear scanning range in both directions) is achieved, with an average power consumption of 150 mW. The resonant frequency is 668 and 297 Hz for x-A nd y-directions, respectively. With a footprint of only 2.5×2.5mm2, this system is part of a device which also integrates an optical waveguide and a collimated lens on the same chip, thus making the fully integrated, self-aligned, and miniaturized 3-D OCT scanners feasible.