Selective Solid-Phase Silicon Epitaxy of p+ Aluminum-Doped Contacts for Nanoscale Devices

Journal Article (2007)
Author(s)

Y Civale (TU Delft - Electronic Components, Technology and Materials)

LK Nanver (TU Delft - Electronic Components, Technology and Materials)

H Schellevis (TU Delft - Electronic Components, Technology and Materials)

Research Group
Electronic Components, Technology and Materials
More Info
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Publication Year
2007
Research Group
Electronic Components, Technology and Materials
Issue number
2
Volume number
6
Pages (from-to)
196-200

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