Selective Solid-Phase Silicon Epitaxy of p+ Aluminum-Doped Contacts for Nanoscale Devices
Journal Article
(2007)
Author(s)
Y Civale (TU Delft - Electronic Components, Technology and Materials)
LK Nanver (TU Delft - Electronic Components, Technology and Materials)
H Schellevis (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:82bceeab-0adb-4762-8aa0-4000cce95af5
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Publication Year
2007
Research Group
Electronic Components, Technology and Materials
Issue number
2
Volume number
6
Pages (from-to)
196-200
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