Ion beam induced intermixing of interface structures in W/Si multilayers

Journal article (2004)

Authors

MJH Kessels External organisation
J Verhoeven External organisation
AE Yakshin External organisation
F.D. Tichelaar QN/High Resolution Electron Microscopy
F Bijkerk External organisation
Research Group
QN/High Resolution Electron Microscopy
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Published Date

2004

Language

Undefined/Unknown

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Research Group

QN/High Resolution Electron Microscopy