Ion beam induced intermixing of interface structures in W/Si multilayers
Journal Article
(2004)
Author(s)
MJH Kessels (External organisation)
J Verhoeven (External organisation)
AE Yakshin (External organisation)
Frans D. Tichelaar (QN/High Resolution Electron Microscopy)
F Bijkerk (External organisation)
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Publication Year
2004
Issue number
3-4
Volume number
222
Pages (from-to)
484-491
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