Ion beam induced intermixing of interface structures in W/Si multilayers

Kessels, MJH; Verhoeven, J; Yakshin, AE; Tichelaar, F. D.; Bijkerk, F.

Ion beam induced intermixing of interface structures in W/Si multilayers

Journal article (2004)

Authors

MJH Kessels External organisation

J Verhoeven External organisation

AE Yakshin External organisation

F. D. Tichelaar

F. Bijkerk External organisation

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2004

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