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Implementation of CMOS-compatible Metamaterial Absorber for gas Sensing Application

Journal Article (2016)
Author(s)

E. Karimi Shahmarvandi (TU Delft - Electronic Instrumentation)

M. Ghaderi (TU Delft - Electronic Instrumentation)

P. Ayerden (TU Delft - Electronic Instrumentation)

G. de Graaf (TU Delft - Electronic Instrumentation)

R.F. Wolffenbuttel (TU Delft - Electronic Instrumentation)

Research Group
Electronic Instrumentation
DOI related publication
https://doi.org/10.1016/j.proeng.2016.11.433
More Info
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Publication Year
2016
Language
English
Research Group
Electronic Instrumentation
Volume number
168
Pages (from-to)
1241-1244
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Abstract

The design of a metamaterial-based absorber for use in a mid-IR microspectrometer-based gas sensor is reported.The microspectrometer consists of a linear variable optical filter (LVOF) that is aligned with an array of thermopiledetectors, which is fabricated on a SiN membrane and covered with the absorber. Special emphasis was put on theCMOS compatible fabrication, which resulted in an absorber design based on aluminium disk resonators and analuminium background plane that are separated by a SiO2 layer. The fabrication process is described, and thechallenges are discussed.