Implementation of CMOS-compatible Metamaterial Absorber for gas Sensing Application

Journal article (2016)

Authors

Ehsan Karimi Shahmarvandi Electronic Instrumentation - EEMCS
M. Ghaderi Electronic Instrumentation - EEMCS
N.P. Ayerden Electronic Instrumentation - EEMCS
G. de Graaf Electronic Instrumentation - EEMCS
R.F. Wolffenbuttel Electronic Instrumentation - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
Copyright: © 2016 Ehsan Karimi Shahmarvandi, M. Ghaderi, N.P. Ayerden, G. de Graaf, R.F. Wolffenbuttel
DOI
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https://doi.org/10.1016/j.proeng.2016.11.433
Gas sensing Microspectrometer Metamaterial absorber Mid-infrared
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Published Date

2016

Language

English

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation

Abstract

The design of a metamaterial-based absorber for use in a mid-IR microspectrometer-based gas sensor is reported.The microspectrometer consists of a linear variable optical filter (LVOF) that is aligned with an array of thermopiledetectors, which is fabricated on a SiN membrane and covered with the absorber. Special emphasis was put on theCMOS compatible fabrication, which resulted in an absorber design based on aluminium disk resonators and analuminium background plane that are separated by a SiO2 layer. The fabrication process is described, and thechallenges are discussed.