Depth-selective 2D-ACAR studies on low-k dielectric thin film S Radiation physics and chemistry
Journal Article
(2003)
Author(s)
Stephan W.H. Eijt (TU Delft - Old - Section Defects in Materials)
A van Veen (TU Delft - Old - Section Defects in Materials)
CV Falub (TU Delft - Old - Section Defects in Materials)
R Escobar Galindo (TU Delft - Old - Section Defects in Materials)
Henk Schut (TU Delft - Old - Section Defects in Materials)
PE Mijnarends (TU Delft - Old - Section Defects in Materials)
Research Group
Old - Section Defects in Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:84c47914-5db5-4b02-933a-ed42bb80019e
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Publication Year
2003
Research Group
Old - Section Defects in Materials
Volume number
68
Pages (from-to)
357-362
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