Design and scale-up of chemical vapour deposition reactors for semiconductor processing
Journal Article
(1996)
Author(s)
C. R. Kleijn (TU Delft - Old - sect Kramers Laboratory (MSP/FT))
KJ Kuijlaars (TU Delft - Old - sect Kramers Laboratory (MSP/FT))
Harry EA van den Akker (TU Delft - Old - sect Kramers Laboratory (MSP/FT))
Research Group
Old - sect Kramers Laboratory (MSP/FT)
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https://resolver.tudelft.nl/uuid:8565e05c-a736-4deb-b943-2e536c9e9c5b
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Publication Year
1996
Research Group
Old - sect Kramers Laboratory (MSP/FT)
Issue number
10
Volume number
51
Pages (from-to)
2119-2128
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