Optomechanical characterization of annealed thin PECVD oxide membranes
Conference Paper
(2016)
Author(s)
M Ghaderi (TU Delft - Electronic Instrumentation)
G de Graaf (TU Delft - Electronic Instrumentation)
RF Wolffenbuttel (TU Delft - Electronic Instrumentation)
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https://resolver.tudelft.nl/uuid:8584dd71-b527-4249-9499-e151ea780866
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Publication Year
2016
Language
English
Pages (from-to)
1-4
Publisher
Elsevier
Event
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85
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