Optomechanical characterization of annealed thin PECVD oxide membranes
Conference Paper
(2016)
Author(s)
Mohammadamir Ghaderi (TU Delft - Electronic Instrumentation)
G. Graaf (TU Delft - Electronic Instrumentation)
R.F. Wolfenbuttel (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
To reference this document use:
https://resolver.tudelft.nl/uuid:8584dd71-b527-4249-9499-e151ea780866
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Publication Year
2016
Language
English
Research Group
Electronic Instrumentation
Pages (from-to)
1-4
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