Optomechanical characterization of annealed thin PECVD oxide membranes
Conference Paper
(2016)
Author(s)
M Ghaderi (TU Delft - Electrical Engineering, Mathematics and Computer Science)
G de Graaf (TU Delft - Electrical Engineering, Mathematics and Computer Science)
RF Wolffenbuttel (TU Delft - Electrical Engineering, Mathematics and Computer Science)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:8584dd71-b527-4249-9499-e151ea780866
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Publication Year
2016
Language
English
Research Group
Electronic Instrumentation
Pages (from-to)
1-4
Publisher
Elsevier
Event
MNE 2015, The Hague, The Netherlands (2015-09-21 - 2015-09-24), Amsterdam
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