Optomechanical characterization of annealed thin PECVD oxide membranes

Conference Paper (2016)
Authors

Mohammadamir Ghaderi (TU Delft - Electronic Instrumentation)

G. Graaf (TU Delft - Electronic Instrumentation)

R.F. Wolfenbuttel (TU Delft - Electronic Instrumentation)

Research Group
Electronic Instrumentation
More Info
expand_more
Publication Year
2016
Language
English
Research Group
Electronic Instrumentation
Pages (from-to)
1-4

No files available

Metadata only record. There are no files for this record.