Design of an aberration corrected low-voltage SEM

Journal article (2010)

Authors

RH van Aken ImPhys/Charged Particle Optics
D.J. Maas External organisation
C.W. Hagen ImPhys/Charged Particle Optics
JE Barth ImPhys/Charged Particle Optics
P. Kruit ImPhys/Charged Particle Optics
Research Group
ImPhys/Charged Particle Optics
More Info
expand_more

Published Date

2010

Language

English

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Research Group

ImPhys/Charged Particle Optics