Design of an aberration corrected low-voltage SEM
Journal Article
(2010)
Author(s)
RH van Aken (TU Delft - ImPhys/Charged Particle Optics)
D.J. Maas (External organisation)
C.W. Hagen (TU Delft - ImPhys/Charged Particle Optics)
JE Barth (TU Delft - ImPhys/Charged Particle Optics)
P. Kruit (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:8753cb94-db4e-4b95-9eed-29ec15f510b6
More Info
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Publication Year
2010
Language
English
Research Group
ImPhys/Charged Particle Optics
Issue number
11
Volume number
110
Pages (from-to)
1411-1419
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