Porous silicon membrane for humidity sensing applications [niet eerder opgevoerd]
Conference Paper
(1998)
Author(s)
gmo O'Halloran (External organisation)
J. Groeneweg (TU Delft - Electronic Components, Technology and Materials)
Pasqualina M Sarro (TU Delft - Electronic Components, Technology and Materials)
Pim J. French (TU Delft - Electronic Instrumentation)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:87540c9f-e066-448a-a6d2-d9f859482033
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Publication Year
1998
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
901-904
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