Porous silicon membrane for humidity sensing applications [niet eerder opgevoerd]

O'Halloran, gmo; Groeneweg, J.; Sarro, P. M.; French, PJ

Porous silicon membrane for humidity sensing applications [niet eerder opgevoerd]

Conference paper (1998)

Authors

gmo O'Halloran External organisation

J. Groeneweg Electronic Components, Technology and Materials

P. M. Sarro Electronic Components, Technology and Materials

PJ French Electronic Instrumentation

Research Group

Electronic Components, Technology and Materials

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Published Date

1998

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Research Group

Electronic Components, Technology and Materials

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