Texture-related roughness of (Nb, Ti)N sputter-deposited films
Journal Article
(2003)
Author(s)
N Iossad (TU Delft - QN/Fysics of NanoElectronics)
N.M. van der Pers (TU Delft - OLD Virtual Materials and Mechanics)
S Grachev (TU Delft - OLD Virtual Materials and Mechanics)
M.R. Zuiddam (TU Delft - QN/Kavli Nanolab Delft)
BD Jackson (TU Delft - QN/Fysics of NanoElectronics)
PN Dmitriev (External organisation)
T.M. Klapwijk (TU Delft - QN/Fysics of NanoElectronics)
Research Group
QN/Fysics of NanoElectronics
To reference this document use:
https://resolver.tudelft.nl/uuid:882a21a7-2969-4ca8-9369-b46d33d87e58
More Info
expand_more
expand_more
Publication Year
2003
Research Group
QN/Fysics of NanoElectronics
Issue number
2
Volume number
13
Pages (from-to)
3301-3304
No files available
Metadata only record. There are no files for this record.