Modal Identification for Multivariable Motion Systems: Applied to a PrototypeWafer-Stage
M. van der Hulst (Eindhoven University of Technology)
R.A. Gonzalez (Eindhoven University of Technology)
K. Classens (Eindhoven University of Technology)
P. Tacx (Eindhoven University of Technology)
N. Dirkx (Eindhoven University of Technology)
J. van de Wijdeven (ASML)
T.A.E. Oomen (Eindhoven University of Technology, TU Delft - Team Jan-Willem van Wingerden)
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