Modal Identification for Multivariable Motion Systems: Applied to a PrototypeWafer-Stage
Maarten Van Der Hulst (Eindhoven University of Technology)
R.A. Gonzalez (Eindhoven University of Technology)
Koen Classens (Eindhoven University of Technology)
Paul Tacx (Eindhoven University of Technology)
Nic Dirkx (Eindhoven University of Technology)
Jeroen van de Wijdeven (ASML)
T.A.E. Oomen (Eindhoven University of Technology, TU Delft - Team Jan-Willem van Wingerden)
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