Characterization of high-resistivity polycrystalline silicon substrates for wafer-level packaging and integration of RF passives

Conference Paper (2004)
Author(s)

M. Bartek (TU Delft - Old - EWI Ch. Integrated Sensing Devices)

SM Sinaga (TU Delft - Old - EWI Ch. Integrated Sensing Devices)

P Mendes (TU Delft - Electronic Components, Technology and Materials)

JH Correia (External organisation)

JN Burghartz (TU Delft - Old - EWI Ch. Integrated Sensing Devices)

Research Group
Old - EWI Ch. Integrated Sensing Devices
More Info
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Publication Year
2004
Research Group
Old - EWI Ch. Integrated Sensing Devices
Pages (from-to)
227-230
ISBN (print)
0-7803-8535-7

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