Characterization of high-resistivity polycrystalline silicon substrates for wafer-level packaging and integration of RF passives

Conference paper (2004)

Authors

M. Bartek Old - EWI Ch. Integrated Sensing Devices
SM Sinaga Old - EWI Ch. Integrated Sensing Devices
P Mendes Electronic Components, Technology and Materials - EEMCS
JH Correia External organisation
JN Burghartz Old - EWI Ch. Integrated Sensing Devices
Research Group
Old - EWI Ch. Integrated Sensing Devices
Elektrotechniek
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Published Date

2004

Language

Undefined/Unknown

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Research Group

Old - EWI Ch. Integrated Sensing Devices