Single photon emission from waveguide-integrated color centers in silicon
Mihika Prabhu (Massachusetts Institute of Technology)
Carlos Errando-Herranz (Universität Münster, Massachusetts Institute of Technology)
Lorenzo De Santis (Massachusetts Institute of Technology, TU Delft - QID/Hanson Lab)
Ian Christen (Massachusetts Institute of Technology)
Changchen Chen (Massachusetts Institute of Technology)
Dirk Englund (Massachusetts Institute of Technology)
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Abstract
We demonstrate silicon color centers coupled to foundry-compatible silicon waveguides. We produced G-centers via carbon implantation in commercial silicon-on-insulator waveguides and measure through-waveguide single-photon emission in the telecommunications O-band.