Properties of DC magnetron sputtered Nb and NbN films for different source conditions.
Journal Article
(1999)
Author(s)
NN Iossad (TU Delft - QN/Fysics of NanoElectronics)
TM Klapwijk (TU Delft - QN/Fysics of NanoElectronics)
SN Polyakov (External organisation)
VV Roddatis (External organisation)
EK Kovev (External organisation)
P Dimitriev (External organisation)
Research Group
QN/Fysics of NanoElectronics
To reference this document use:
https://resolver.tudelft.nl/uuid:89a9068c-bb4b-42c5-ba0d-68cc5ca26845
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Publication Year
1999
Research Group
QN/Fysics of NanoElectronics
Issue number
2
Volume number
9
Pages (from-to)
1720-1723
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