Analysis of structure and defects in thin silicon films deposited from hydrogen diluted silane
Journal Article
(2006)
Author(s)
G van Elzakker (TU Delft - Electronic Components, Technology and Materials)
V Nadazdy (TU Delft - Electronic Components, Technology and Materials)
F.D. Tichelaar (QN/High Resolution Electron Microscopy)
JW Metselaar (TU Delft - Electronic Components, Technology and Materials)
M Zeman (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:89c692d3-42e7-4567-ac85-1585ea8a494f
More Info
expand_more
expand_more
Publication Year
2006
Research Group
Electronic Components, Technology and Materials
Volume number
511-512
Pages (from-to)
252-257
No files available
Metadata only record. There are no files for this record.