Analysis of structure and defects in thin silicon films deposited from hydrogen diluted silane

Journal article (2006)

Authors

G van Elzakker Electronic Components, Technology and Materials -

V Nadazdy Electronic Components, Technology and Materials -

F.D. Tichelaar QN/High Resolution Electron Microscopy

JW Metselaar Electronic Components, Technology and Materials -

M. Zeman Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

Elektrotechniek Techniek

More Info

expand_more

To reference this document use:

http://resolver.tudelft.nl/uuid:89c692d3-42e7-4567-ac85-1585ea8a494f

Published Date

2006

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials